Design Services History and Examples

This information is presented, mainly, as an aid to those who are
 looking for someone to help them on their projects.

This is a simplified drawing of a camera used for making integrated circuits.


The items 160 &165 are part of a LASER interferometer measurement system used for measuring the XY stage (110) position. The master image, or reticle (140), is re-imaged on the wafer which is sitting on plate 100. The wafer has a photo sensitive coating, like the film used in a camera, and its called photo resist. The photo resist records each image. Item 135 is the illuminator. After the wafer is exposed, it is developed in a solution which removes the resist (positive resist process) in the areas that were illuminated through the reticle. The remaining resist defines the areas of the wafer which are not to be affected by the subsequent processing (etching, coating...etc.).

My project history.

Updated: Febuary 2012

My thanks goes out to those who have given me projects to work on. Please feel free to contact me at any time, about any issue. I look forward to hearing from you. I would like to help you with any task you have in mind.
Thank you for your consideration, concerning the use of my help.
My current rate per hour is: $120 USD.

Here are a few of the tools I have used:

Mechanical  Optical Electrical Some Miscellaneous Items

SolidWorks

 SYNOPSYS Micro-Cap (Evaluation) Tools, Odds & Ends

The following is a chronological list of projects I have been a part of:

1968-72 Went to school. Received BSEE degree from UC Berkeley. I was about 25, at the start.

1972-74 Built various machines for semiconductor mask makers. Worked for Ultratech Corp..
Responsibilities: VP & General manager, Electrical design, Optical design, Inventory system development

1974-82 Built a wafer step and repeat camera. Worked for Ultratech Corp.. The first units model number was 900.
Responsibilities:
-VP & General manager
-Test resists, Test lenses
-Assemble, align, test, and modify the air bearing stage and copy lens
-Design and write the operating program. The computer I used was an HP9825 Desk Top calculator running in HP's "HPL" language.
-Design, and assemble, the optical alignment system including its electronics and software
-Develop manufacturing systems for production of all assemblies

1982-89 Built various system and sub system tests for the Ultratech Stepper. Worked as a consultant to Ultratech Stepper Corp..

Started Semifusion Corp.. This was for the purpose of producing electronics for the Ultratech Wafer Stepper. My brother Bill, also an electrical engineer, owns and runs this this company.

1986-89 Built the prototype alignment system for an X-Ray wafer stepper. Also built air bearing stage parts and created designs for improved stage performance. This was done as a consulting arrangement with Hampshire Instruments.

1989-98 Built various process machine electronic control systems and operating programs. EDC/Accord Technology builds equipment for hard disk manufactures. This was done as a consulting arrangement.

1990-91 Built prototype electronics and controls for a 10kw induction heater. The unit was used to dry can lids and was first used by COORS Beer, as I understand. This was done as a consulting arrangement with Mountain Gate Engineering, Campbell, CA.

1991- 2005 Design and/or test: (optical and E-beam) semiconductor lithography stages, lithography tool main bodies, opto-mechanical assemblies, and related items for Nikon Research Corporation of America. This is being done as a consulting arrangement.

1998-2000 Design and/or test: (E-beam) semiconductor lithography stages, and related items for Ion Diagnostics Inc. , Santa Clara, CA.. This was done as a consulting arrangement.

Multi- Column E- Beam Technology for Wafer Inspection (Spie Paper)

Ion Diagnostics' first system's stage, which is used to support the wafer.

2002 Design a concept of an under water platform/stage for Raman spectrometry in the ocean, several thousand meters below sea level ( Report ). I worked on this task for the Monterey Bay Aquarium Research Institute, Moss Landing, California USA. This was done as a consulting arrangement.

2005-2009 Withdrew from my ongoing consulting activities. Upon my Dad's death (March 2005) I decided to spend my portion of the inheritance given to me. I am the oldest of 9 brothers and sisters who were to equally divide and share his belongings.

2009-Current Work on items that others would like me to help them with. This is typically done as a consulting arrangement.

Patents which include myself as the inventor:

Patent Number

Description 
(Patent search words: "Martin E Lee", "Martin Lee", "Saratoga", "San Jose"

 Date of Filing
 US3783193 Apparatus for activating a remotely located device in response to the ringing of a called telephone subscriber station.
This was my first patent. I built this device for my Dad as a Christmas present that he could use to preheat his cabin at Lake Almanor, CA, I delivered it, as I remember about 2 Christmases later. This first one was built using timing motors with micro switches instead. I sold the rights to the patent for $1,800 and bought a stereo system for our living room. As I put up this page, it reminds me that the stereo, not functional, is in our front room, my wife still likes the cabinet.		 01/28/1971
 US4444492 Apparatus for projection a series of images onto dies of a semiconductor wafer 07/29/1982 
 US5528118 Guideless stage with isolated reaction stage. 05/01/1994
 US5552888 Apparatus for measuring position of an X-Y stage. 12/02/1994
 US5708505 Laser interferometer having a sheath for the laser beam. 06/29/1996 
 US5744924 Guideless stage with isolated reaction frame. 06/20/1996
 US5838450 Direct reticle to wafer alignment using fluorescence for integrated circuit lithography. 06/02/1995
 US5874820 Window frame-guided stage mechanism. 04/04/1995
 US5942871 Double Flexure Support For Stage Drive Coil 04/02/1996 
 US5982128 Lithography apparatus with movable stage and mechanical isolation of stage drive 02/04/1998
 US6008500 Exposure apparatus having dynamically isolated reaction frame 05/27/1999 
 US6020710 Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame   05/26/1999 
 US6130490 X-Y Stage with Movable Magnet Plate  05/06/1999 
 US6355994 Precision Stage  05/05/2000
 US6471435 Flexural Joint  05/05/2000
 US6646719 Support Assembly for an Exposure Apparatus  01/31/2001 

Thank you for your consideration.

Martin E. Lee

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